| 简介 |
The present invention relates to a method for manufacturing a feed-through. The present invention includes a first stop of forming a cylindrical base by mixing elements from a group of Al2O3, Y2O3, Al2O3/Y2O3, ZrO2, AlC, TiN, AlN, TiC, MgO, CaO, CeO2, TiO2, BN, SiO2, SiC, YAG, Mullite, and AlF3, a second stop of forming a combination hole, a third step of forming an insulation layer, a fourth step of forming a plurality of combination holes, and a fifth step of forming a receiving groove and an O-ring in the inner side of the receiving groove to prevent the pressure of a vacuum chamber or a high pressure chamber from being leaked to the outside.COPYRIGHT KIPO 2016 |
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