| 简介 |
The present invention relates to a manufacturing method of a feed-through comprising : a first step of preparing a base which is formed by mixing one or more of a group consisting of Al_2O__3, Y_2O_3, Al_2O_3/Y_2O_3, ZrO_2, AlC, TiN, AlN, TiC, MgO, CaO, CeO_2, TiO_2, BN, SiO_2, SiC, YAG, Mullite, and AlF_3 which are ceramic materials, and is formed in a cylindrical shape; a second step of forming multiple electrode grooves which are incoming to the inside to be radially separated from each other on the outer peripheral face of the base; a third step of forming an electrode layer on the outer peripheral face of the base by thermal spray coating; a fourth step of polishing the outer peripheral face of the electrode layer, making the upper portion of the electrode layer be the same as the electrode groove upper portion of the base, and polishing such that only an electrode remains between the electrode grooves; a fifth step of forming an insulation layer to surround the base and the outer circumference of a plurality of electrodes; a sixth step of forming multiple coupling holes penetrated from the front to the rear on the inside separated from the outside of the insulation layer; and a seventh step of forming a placement groove circularly formed inward and separated from the outside of the multiple electrodes on the front side of the insulation layer and preparing an O-ring which prevents pressure in a vacuum chamber or a high pressure chamber from leaking out in the placement groove.COPYRIGHT KIPO 2016 |
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