| 简介 |
PROBLEM TO BE SOLVED : To provide : a wiring film for flat panel displays which is arranged so that the rise in wiring resistance is suppressed even when suffering a heat hysteresis of a high temperature of 400-500°C, and which never causes hillock or the like, and is superior in heat resistance; and a sputtering target which can be used for forming such a wiring film.
SOLUTION : A wiring film for flat panel displays is one to be formed on a substrate. The wiring film comprises a laminate structure arranged by laminating : a first layer including at least one or more kind of high-melting point metal selected from a group consisting of Mo, Ti, Cr, W, and Ta; and a second layer made of an Al alloy including 0.01-0.2 atom% of at least one or more kind of a rare earth element, Ni, and Co.
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