| 简介 |
The purpose of the present invention is to improve conduction reliability of a high-voltage electrode in an ozone generating apparatus. This ozone generating apparatus is provided with : a housing having a starting material gas chamber into which a starting material gas flows, and an ozone gas chamber out of which an ozonized gas flows; a grounding electrode, which is disposed on the inner side of the housing, and which has a cylindrical cavity inside; a glass tube, which has one end sealed, and has a solder film formed on the inner surface thereof; and a high frequency power supply that supplies potential to the solder film via a power supply line. The glass tube is disposed concentrically with the cavity of the grounding electrode, and the solder film is formed containing a rare-earth element. |
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