| 简介 |
PROBLEM TO BE SOLVED : To provide a conductive corrosion-resistant member and a conductive corrosion-resistant component, which exhibit high versatility and have high conductivity, corrosion resistance against halogen-based corrosive gas or plasma of the gas, and high mechanical strength and thermal shock resistance when applied to various members for an apparatus for manufacturing a semiconductor, and to provide a method for manufacturing a conductive corrosion-resistant member.
SOLUTION : The conductive corrosion-resistant member is, in at least a part thereof, exposed to one of or both of halogen-based corrosive gas and plasma of the gas, and comprises a sintered body comprising fibrous carbon and a single material of yttrium oxide particles or metal composite oxide particles prepared by compounding two or more oxides selected from the group consisting of yttrium oxide, aluminum oxide and rare earth oxide. The fibrous carbon has a diameter of over 50 nm and 300 nm or less and a length of 25 μm or less. The sintered body has a relative density that is 97% of the theoretical density.
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