| 简介 |
PROBLEM TO BE SOLVED : To provide a current measuring device capable of improving the accuracy of measurement results, and an ion current measuring system.
SOLUTION : A current measuring device comprises : an amplifier circuit 13 that amplifies input current to convert it into output voltage and that is connected for negative feedback; a housing 11 for housing the amplifier circuit 13; and a rare gas supply part 51 that is connected to the housing 11 to supply rare gas to the inside of the housing 11. The current measuring device further comprises : an A/D converter 21 that is connected to the amplifier circuit 13 to convert the output voltage into digital values and that is housed in the housing 11; and a data processing part 22 that is connected to the A/D converter 21 to perform data processing on the digital values and that is housed in the housing 11.
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