| 简介 |
PROBLEM TO BE SOLVED : To provide a method of efficiently manufacturing a stable target by a sintering method, which is an aluminum alloy target of aluminum added with a rare earth element, does not change in composition in temperature rise during sputtering, and has intermetallic compound finely dispersed.
SOLUTION : In an alloy target in which an atomic ratio of aluminum and a rare earth element falls in such a range that the alloy target constitutes of only two types of intermetallic compounds, a manufacturing method of the alloy target according to the invention includes steps of : preparing at least one of a mixture, alloy powder, alloy particles, or an alloy ingot as a raw material, which is prepared to a predetermined ratio of the range; producing alloy powder of aluminum and the rare-earth element from the raw material in an inert gas atmosphere using an atomization method; and providing a sintered body from the alloy powder obtained by the atomization method using a hot-pressing method or a discharge plasma sintering method in vacuum atmosphere.
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