申请日期 | 2025-07-05 | 申请号 | US14413255 |
公开(公告)号 | US20150132700A1 | 公开(公告)日 | 2015-05-14 |
公开国别 | US | 申请人省市代码 | 全国 |
申请人 | Eugen PAVEL | ||
简介 | A method of making a photoresist with rare-earth sensitizers is provided. The rare-earth sensitizer could be a salt or a rare-earth complex. According to the invention, photoresist composition is useful to pattern circuits by visible light. |
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