| 简介 |
PROBLEM TO BE SOLVED : To provide a method for manufacturing a target inexpensively without imposing a burden on the environment as a result of using and disposing targets. SOLUTION : The method for manufacturing a regenerated target includes : a step for preparing a raw material for a regenerated target by pulverizing a used target used in the manufacturing of an oxide superconductive layer containing rare earth metal, barium, copper, and oxygen by a laser vapor deposition method; a step for analyzing the composition of the pulverized matter of the used target, and further adding, when the elementary composition ratio of the pulverized matter of the used target is different from a desirable elementary composition ratio, pulverized matter of a second used target having an elementary composition ratio different from that of the used target; and a step for obtaining a regenerated target by sintering after molding the regenerated target material. COPYRIGHT : (C)2013, JPO&INPIT |
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