| 简介 |
The present invention addresses the problem of providing : a cerium oxide abrasive containing cerium oxide abrasive particles produced by a synthesis method using a rare-earth-salt aqueous solution and a precipitant, the cerium oxide abrasive particles contained in the cerium oxide abrasive being spherical particles and exhibiting excellent polishing performance (polishing speed and polishing-surface polishing accuracy); a method for producing the same; and a polishing method. This cerium oxide abrasive is one containing spherical cerium oxide abrasive particles produced by a synthesis method using a rare-earth-salt aqueous solution and a precipitant, the cerium oxide abrasive being characterized in that the cerium oxide abrasive particles thereof are spherical particles having an average aspect ratio in the range of 1.00-1.15. |
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