| 申请日期 | 2025-07-11 | 申请号 | WOUS14038858 |
| 公开（公告）号 | WO2014197203A1 | 公开（公告）日 | 2014-12-11 |
| 公开国别 | WO | 申请人省市代码 | 全国 |
| 申请人 | APPLIED MATERIALS INC | ||
| 简介 | An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol% to about 99 mol%, ZrO2 in a range between about 0 mol% to about 55 mol%, and Al2O3 in a range between about 0 mol% to about 10 mol%. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol% to about 60 mol%, ZrO2 in a range between about 0 mol% to about 20 mol%, and Al2O3 in a range between about 30 mol% to about 60 mol%. | ||
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