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Method for producing group 13 nitride crystal and apparatus for producing the same 发明申请

2023-04-08 4740 848K 0

专利信息

申请日期 2026-04-21 申请号 EP14157492
公开(公告)号 EP2787104A1 公开(公告)日 2014-10-08
公开国别 EP 申请人省市代码 全国
申请人 Ricoh Company Ltd
简介 A method for producing a group 13 nitride crystal, comprises a crystal growth step of reacting nitrogen and a mixed melt (24) containing at least a group 13 metal and at least one of an alkali metal and an alkaline earth metal, in the mixed melt (24), to grow a nitride crystal (27) on a seed crystal (30), wherein at least one of the mixed melt (24) and the seed crystal (30) is rotated in the crystal growth step, a relative speed between the mixed melt (24) and the seed crystal (30) in the crystal growth step is repeatedly fluctuated in accordance with one or a plurality of types of predetermined patterns, and a maximum value of the relative speed indicated by the pattern is 0.01 m/s or more.


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