| 简介 |
PROBLEM TO BE SOLVED : To provide a manufacturing method of a high quality group 13 nitride crystal.
SOLUTION : A manufacturing method of a group 13 nitride crystal according to the present invention includes a crystal growing step for growing the nitride crystal on a seed crystal 30 in a mixed melt 24 containing at least one of an alkali metal and an alkali earth metal, and a group 13 metal by reacting the mixed melt 24 and nitrogen. In the crystal growing step, at least one of the mixed melt 24 and the seed crystal 30 is rotated and a relative speed of the mixed melt 24 and the seed crystal 30 in the crystal growing step is varied according to one or more predetermined patterns repeatedly and the maximum value of the relative speed shown in the patterns is 0.01 m/s or more.
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