| 简介 |
PROBLEM TO BE SOLVED : To provide a hard film more excellent in abrasion resistance than a conventional nitride film or oxide film.
SOLUTION : In a hard film formed on a substrate, a composition formula is shown as (TiaAlbSicRd)Ox (where, R shows a rare earth element, a, b, c, d show each atomic ratio of Ti, Al, Si, R, and x shows the atomic ratio of O), and following relations are satisfied : 0.30≤a≤0.7, 0.30≤b≤0.70, 0≤c≤0.2, 0.005≤d≤0.05, a+b+c+d=1, 0.5≤a/b<1, and further, when R does not contain Ce, following relation (1) is satisfied, and when R contains Ce, following relation (2) is satisfied; 0.8≤[x/(2a+1.5b+2c+1.5d)]≤1.2...(1)0.8≤[x/(2a+1.5b+2c+2d)]≤1.2...(2).
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