| 简介 |
This hard film has the composition (TiaAlbSicRd)Ox (where R represents a rare earth element; a, b, c, and d represent the atomic ratio of Ti, Al, Si, and R, respectively; and x represents the atomic ratio of O); satisfies 0.30 ≤ a ≤ 0.7, 0.30 ≤ b ≤ 0.70, 0 ≤ c ≤ 0.2, 0.005≤ d ≤ 0.05, a + b + c + d=1, and 0.5 ≤ a/b < 1; satisfies the relationship 0.8 ≤ [x/(2a + 1.5b + 2c + 1.5d)] ≤ 1.2 if R does not contain Ce; satisfies the relationship 0.8 ≤ [x/(2a + 1.5b + 2c + 2d)] ≤ 1.2 if R contains Ce; and has better wear resistance than conventional nitride films or oxide films. |
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