| 简介 |
PROBLEM TO BE SOLVED : To provide an abrasive which does not use an abrasive grain including a rare earth element such as a cerium oxide abrasive grain, and secures polishing performance (polishing rate and surface roughness) which is equivalent to a case where the cerium oxide abrasive grain is used.SOLUTION : The abrasive includes : an abrasive grain of which main constituent is zirconium oxide (ZrO2); and a polishing assistant which includes a bivalent iron. The polishing assistant is an iron compound such as iron sulfate (II) or iron chloride (II). A content percentage of the assistant (Ma/Mg) that is a mass ratio of the polishing assistant content (Ma) to the abrasive grain content (Mg), is preferably 0.01-0.7. Improvement of polishing performance by use of the polishing assistant is attributable to a mild acidity and a reducibility developed by Fe2+.COPYRIGHT : (C)2014, JPO&INPIT |
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