| 简介 |
PROBLEM TO BE SOLVED : To provide a method for manufacturing a permanent magnet capable of achieving high utilizing efficiency of an evaporation material.
SOLUTION : In a processing chamber 70, at least two sheets of tabular evaporation material RM containing at least one kind selected from Dy, Tb, and Ho, are arranged facing each other with a distance and a plurality of iron-boron-rare earth based sintered magnets S are arranged between evaporation materials. Under reduced pressure, the processing chamber is heated to heat sintered magnets at a predetermined temperature and to evaporate the evaporation material, at least one kind selected from vaporized Dy, Tb and Ho, is attached to the surface of the sintered magnet by adjusting the amount of supply, and at least one kind selected from attached Dy, Tb and Ho, is dispersed in the grain boundaries and/or grain boundary phase of the sintered magnet. Each of sintered magnets is supported by a support member 81 having a plurality of openings to allow at least one kind selected from vaporized Dy, Tb and Ho to pass therethrough, and the proportion of the total area of each openings to an area of a surface which is opposed to evaporation materials of the support member, is equal to or more than 40%.
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