| 简介 |
A thermal spray material according to the present invention contains granules each containing an oxyfluoride of a rare earth element, has a cumulative volume particle size of 1 to 150 μm at a cumulative volume of 50 vol% as measured by a laser diffraction scattering particle size distribution measurement method before the thermal spray material is subjected to an ultrasonic dispersion treatment, and has a cumulative volume particle size of 10 μm or less as measured in the same manner as mentioned above after the thermal spray material is subjected to an ultrasonic dispersion treatment at 300 W for 15 minutes, wherein the cumulative volume particle size of the thermal spray material after the thermal spray material is subjected to an ultrasonic dispersion treatment is 1/3 or less of that before the thermal spray material is subjected to an ultrasonic dispersion treatment. The thermal spray material has an average aspect ratio of 2.0 or less and a compaction degree of 30% or less. When each of the granules contains a fluoride of a rare earth element as well as the oxyfluoride of the rare earth element, it is preferred that the ratio (S1/S2) of the intensity (S1) of the maximum peak of the oxyfluoride of the rare earth element, which is observed in a range of 2θ = 20 to 40 degrees, to the intensity (S2) of the maximum peak of the fluoride of the rare earth element, which is also observed in the above-mentioned range, is 0.10 or more in an X-ray diffraction measurement using Cu-Kα line or Cu-Kα1 line. |
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