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Thermal spray powder, method for forming thermal spray coating, and plasma resistant member 发明授权

2023-11-25 2720 673K 0

专利信息

申请日期 2025-06-28 申请号 KR1020070110165
公开(公告)号 KR101422152B1 公开(公告)日 2014-07-16
公开国别 KR 申请人省市代码 全国
申请人 TOKYO ELECTRON LIMITED; FUJIMI INCORPORATED
简介 A thermal spray powder contains granulated and sintered particles composed of an oxide of any of the rare earth elements having an atomic number from 60 to 70. The average particle size of the primary particles constituting the granulated and sintered particles is 2 to 10 μm. The crushing strength of the granulated and sintered particles is 7 to 50 MPa. A plasma resistant member includes a substrate and a thermal spray coating provided on the surface of the substrate. The thermal spray coating is formed by thermal spraying, preferably plasma thermal spraying, the thermal spray powder.


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