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APPARATUS AND METHOD OF MANUFACTURING ELECTRODE FOR LITHIUM ION CAPACITOR 发明申请

2023-05-03 4690 147K 0

专利信息

申请日期 2025-07-10 申请号 JP2012279685
公开(公告)号 JP2014123663A 公开(公告)日 2014-07-03
公开国别 JP 申请人省市代码 全国
申请人 TOKYO ELECTRON LTD
简介 PROBLEM TO BE SOLVED : To shorten the time required for doping lithium ions into an electrode material on an electrode sheet. SOLUTION : An apparatus of manufacturing the electrode for a lithium ion capacitor includes a processing chamber 200 for which an electrode sheet can be carried in and out, a rare gas supply section 230 for introducing rare gas into the processing chamber, an exhaust device 220 for evacuating the processing chamber to bring about a predetermined vacuum pressure, and a lithium spray unit 210 for doping lithium ions, by spraying lithium-containing powder while fusing, thereby depositing a thin film of lithium on a carbon material C of an electrode sheet W carried into the processing chamber. COPYRIGHT : (C)2014, JPO&INPIT


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