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Target for ultraviolet light generation, and method for manufacturing same 发明授权

2023-03-29 3260 1332K 0

专利信息

申请日期 2025-06-26 申请号 US15580335
公开(公告)号 US10381215B2 公开(公告)日 2019-08-13
公开国别 US 申请人省市代码 全国
申请人 HAMAMATSU PHOTONICS K K
简介 A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.


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