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ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR AND ELECTRODE MANUFACTURING METHOD THERE 发明申请

2023-06-11 3710 547K 0

专利信息

申请日期 2026-04-28 申请号 KR1020130153324
公开(公告)号 KR1020140081676A 公开(公告)日 2014-07-01
公开国别 KR 申请人省市代码 全国
申请人 TOKYO ELECTRON LIMITED
简介 A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamber (200) to and from which the electrode sheet is loaded and unloaded; a rare gas supply unit (230) configured to introduce a rare gas into the processing chamber; an exhaust device (220) configured to exhaust an inside of the processing chamber to a certain vacuum level; and a lithium thermal spraying unit (210) configured to dope with the lithium ion by forming a lithium thin film on the carbon material (C) of the electrode sheet (W) loaded into the processing chamber while melting and spraying lithium-containing powder.(120A) Exhauste device(220, 120B) Exhauste device(232, 132A, 132B) Rare gas supply source(239) Lithium-containing powder(300) Control unit(310) Manipulation unit(320) Storage unitCOPYRIGHT KIPO 2014


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