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Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method there 发明申请

2023-05-28 1510 360K 0

专利信息

申请日期 2025-06-26 申请号 EP13198068
公开(公告)号 EP2747176A2 公开(公告)日 2014-06-25
公开国别 EP 申请人省市代码 全国
申请人 TOKYO ELECTRON LIMITED
简介 A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamber 200 to and from which the electrode sheet is loaded and unloaded; a rare gas supply unit 230 configured to introduce a rare gas into the processing chamber; an exhaust device 220 configured to exhaust an inside of the processing chamber to a certain vacuum level; and a lithium thermal spraying unit 210 configured to dope a carbon material C with the lithium ion by forming a lithium thin film on the carbon material of the electrode sheet W loaded into the processing chamber while melting and spraying lithium-containing powder.


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