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THERMAL SPRAY POWDER AND FILM THAT CONTAIN RARE-EARTH ELEMENT, AND MEMBER PROVIDED WITH FILM 发明申请

2023-04-29 4970 325K 0

专利信息

申请日期 2025-06-24 申请号 KR1020147010415
公开(公告)号 KR1020140076588A 公开(公告)日 2014-06-20
公开国别 KR 申请人省市代码 全国
申请人 FUJIMI INC; TOKYO ELECTRON LTD
简介 A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.


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