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OXIDE FOR SEMICONDUCTOR LAYER OF THIN-FILM TRANSISTOR, SPUTTERING TARGET, AND THIN-FILM TRANSISTOR 发明授权

2023-10-01 4860 636K 0

专利信息

申请日期 2025-07-07 申请号 KR1020127029973
公开(公告)号 KR101407402B1 公开(公告)日 2014-06-09
公开国别 KR 申请人省市代码 全国
申请人 KOBE STEEL LTD; SAMSUNG DISPLAY CO LTD
简介 Disclosed is an oxide for a semiconductor layer of a thin-film transistor, said oxide being excellent in the switching characteristics of a thin-film transistor, specifically enabling favorable characteristics to be stably obtained even in a region of which the ZnO concentration is high and even after forming a passivation layer and after applying stress. The oxide is used in a semiconductor layer of a thin-film transistor, and the aforementioned oxide contains Zn and Sn, and further contains at least one element selected from group X consisting of Al, Hf, Ta, Ti, Nb, Mg, Ga, and the rare-earth elements.


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