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SEMICONDUCTOR DEVICE WITH A SILICON DIOXIDE GATE INSULATION LAYER IMPLANTED WITH A RARE EARTH ELEMEN 发明申请

2023-08-09 4070 418K 0

专利信息

申请日期 2025-08-06 申请号 US13689936
公开(公告)号 US20140151818A1 公开(公告)日 2014-06-05
公开国别 US 申请人省市代码 全国
申请人 GLOBALFOUNDRIES INC
简介 One illustrative method disclosed herein includes forming a gate insulation layer on a semiconducting substrate, performing an ion implantation process to implant a rare earth element into the gate insulation layer, and forming a silicon-containing gate electrode above the gate insulation layer comprising the implanted rare earth element. One illustrative device disclosed herein includes a gate insulation layer positioned on a semiconducting substrate, wherein the gate insulation layer is comprised of silicon dioxide and a rare earth element, and a silicon-containing gate electrode positioned on the gate insulation layer.


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