| 简介 |
PROBLEM TO BE SOLVED : To provide an intermediate (alcohol derivative) of an acrylate derivative which is useful as a raw material of a polymeric compound for a resist composition that has excellent lithographic characteristics and forms a resist pattern in a good profile.SOLUTION : The alcohol derivative is expressed by formula (2) described below, and a production method of the derivative is provided. In the formula, R, R, R, Rto Rrepresent H, an alkyl group, a cycloalkyl group or an alkoxy group; Rand Rrepresent H, an alkyl group, a cycloalkyl group or an alkoxy group, or Rand Rare bonded to form an alkylene group, -O- or -S-; and Rrepresents H or an alkyl group or a cyclic hydrocarbon group. |
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