| 简介 |
A hydrogen sensor comprising : a substrate, a detection film which is formed on the substrate and is composed of a rare earth metal, a protection film which is formed on the detection film and is a dispersion of hydrogen-permeable metal particles in a ceramic material, and a pair of electrodes which is formed apart on the protection film and are electrically connected with the detection film via the protection film. The hydrogen-permeable metal particles are Pd, Pt, Nb, V and Ta and the preferable content thereof is 20 to 70% by mass. It is preferred that the resistance of the protection film between the electrodes is 10 to 100, 000 © and that the resistance of the detection film in the interelectrode direction is smaller than the resistance of the protection film in the interelectrode direction. |
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