| 简介 |
PROBLEM TO BE SOLVED : To provide an oxide superconducting thin film manufactured by using an FF-MOD method, and having sufficiently high Jc and Ic, and a method for manufacturing the same.
SOLUTION : A method for manufacturing an oxide superconducting thin film, comprises the steps of : forming a coating film of a raw material solution prepared by dissolving organometallic compounds of RE (a rare earth element) not containing fluorine, Ba and Cu into a solvent (coating film forming step); thermally decomposing and removing an organic component contained in the coating film to form a temporarily baked film (temporarily baking treatment step); and crystallizing the temporarily baked film to form a baked film (baking treatment step). The baking treatment step includes the steps of : decomposing barium carbonate generated at the temporarily baking treatment step, under the atmosphere in which an oxide superconductor crystal is not generated (barium carbonate decomposing step); and growing the oxide superconductor crystal from an intermediate heat treatment film in which the barium carbonate is decomposed by the barium carbonate decomposing step, under the atmosphere in which the oxide superconductor crystal is generated, to form an oxide superconductive layer (oxide superconductive layer forming step).
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