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Actuator device and manufacturing method thereof and a liquid ejection head 发明授权

2023-10-20 3290 199K 0

专利信息

申请日期 2025-07-10 申请号 JP2008169799
公开(公告)号 JP5344120B2 公开(公告)日 2013-11-20
公开国别 JP 申请人省市代码 全国
申请人 Seiko Epson2369
简介 Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.


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