| 简介 |
PROBLEM TO BE SOLVED : To provide a high efficiency manufacturing method of a mayenite type compound having ≥1×1015cm-3electron density and high secondary electron emission coefficient. SOLUTION : The manufacturing method of the conductive mayenite type compound is characterized by treating a mayenite type compound with plasma generated from a rare gas. A power source of the plasma generation is preferably AC of RF frequency, VHF frequency or microwave frequency. The electron density of the resultant conductive mayenite type compound is preferably ≥1×1015cm-3. COPYRIGHT : (C)2010, JPO&INPIT |
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