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SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME 发明申请

2023-09-21 4890 664K 0

专利信息

申请日期 2025-07-07 申请号 US13521051
公开(公告)号 US20130240958A1 公开(公告)日 2013-09-19
公开国别 US 申请人省市代码 全国
申请人 Jing Wang; Lei Guo; Wei Wang
简介 A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises : a semiconductor substrate; an active region formed in the semiconductor substrate, in which the active region comprises : a channel region, and a source region and a drain region formed on both sides of the channel region respectively; and a first isolation trench formed in the semiconductor substrate and on both sides of the active region, in which a first rare earth oxide layer is formed in each first isolation trench to produce a stress in the channel region in a channel length direction.


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