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SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME 发明申请

2023-06-01 3780 949K 0

专利信息

申请日期 2025-06-24 申请号 WOCN12076240
公开(公告)号 WO2013135005A1 公开(公告)日 2013-09-19
公开国别 WO 申请人省市代码 全国
申请人 TSINGHUA UNIVERSITY; WANG Jing; GUO Lei; WANG Wei
简介 A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises : a semiconductor substrate (100); an active region formed in the semiconductor substrate (100), in which the active region comprises : a channel region (200), and a source region (300) and a drain region (400) formed on both sides of the channel region (200) respectively; and a first isolation trench (500) formed in the semiconductor substrate (100) and on both sides of the active region, in which a first rare earth oxide layer (502) is formed in each first isolation trench (500) to produce a stress in the channel region (200) in a channel length direction.


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