| 简介 |
PROBLEM TO BE SOLVED : To provide an Ag alloy film, which has a low electrical resistivity necessary for electrical wiring being almost the same level as pure Ag film, and is excellent in durability (more concretely, salt water resistance, halogen resistance) and adhesion strength to a substrate compared with a conventional Ag alloy film, and preferably achieves a high film-forming speed in sputtering almost equivalent to that of pure Ag when forming the Ag alloy film by a sputtering method.
SOLUTION : An Ag alloy film used for reflective film and/or penetration film, or electrical wiring and/or electrode includes 0.1-1.5 atom% of at least one selected from a group consisting of Pd, Au and Pt; at least one of rare earth elements; 0.02-1.5 atom% of at least one selected from a group consisting of Bi and Zn; and the balance consisting of Ag and inevitable impurities.
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