| 简介 |
An electrostatic chuck member : comprising a complex oxide sintered body having some yttrium in an yttrium aluminium oxide substituted with a rare earth element (RE) excluding yttrium; having a ratio [NRE/(NY+NRE)] of at least 0.01 and less than 0.5, between the number (NRE) of rare earth element atoms excluding yttrium and the sum (NY+NRE) of the number of yttrium atoms (NY) and the number (NRE) of rare earth element atoms excluding yttrium; and having a volume resistance of at least 1×1010 Ω·cm and less than 1×1015 Ω·cm. |
客服热线：
手机版
二维码
