| 简介 |
A method for producing a ceramic heater includes performing firing at 1, 600° C. to 1, 750° C. in a state in which front and back surfaces of an inner shaped body composed of low-temperature sinterable raw material powder containing aluminum nitride powder as a main component and 0.03% to 1% by weight of rare earth oxide powder are sandwiched between a pair of outer layers composed of aluminum nitride sintered bodies having a volume resistivity of 1015 Ωcm or more through resistive heating elements composed of metal meshes, thereby obtaining a ceramic heater. |
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