| 简介 |
PROBLEM TO BE SOLVED : To provide a palladium metal film laminated film which shows a surface resistance value stabilized with time.
SOLUTION : The palladium metal film laminated film is a laminate in which the palladium metal film is laminated at least one side of a base material film, and a concentration of rare gas contained in the metal film is 0.03-0.1 atm% or lower. In the other way, the palladium metal film laminated film is the a laminate in which the palladium metal film is laminated at least at one side of a base material film, and the palladium surface density A of the palladium metal film immediately after film formation and the surface resistance value B of the palladium metal film immediately after the film formation satisfy a formula (1) : A×B≤7, 000×1015 (1).
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