申请日期 | 2025-06-30 | 申请号 | US13819476 |
公开(公告)号 | US20130154469A1 | 公开(公告)日 | 2013-06-20 |
公开国别 | US | 申请人省市代码 | 全国 |
申请人 | Tadahiro Ohmi; Tetsuya Goto; Hidekazu Ishii | ||
简介 | Provided is a cathode body that comprises a cylindrical cup 30 as a base member, a barrier layer 303 provided on a surface of the cylindrical cup 30 and containing SiC, and a film formed on a surface of the barrier layer 303 and containing a boride of a rare earth element and that can prevent interdiffusion of a constituent element of the base member and the boride. |
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