| 简介 |
PROBLEM TO BE SOLVED : To provide a separation device having an end material removing function capable of surely removing an end material generated during separation of a substrate by a simple and compact mechanism and accumulating and breaking it in a box set at a constant position.SOLUTION : In the separation device for separating a brittle material substrate M by causing a crack or kerf along a break-scheduled line by a scribe forming unit 6, a table for placing the substrate includes a main table 2 and a rotary table 3, and the rotary table 3 is arranged in the vicinity of the scribe forming unit 6 and formed so that an end material M1 of the brittle material substrate M generated during separation can be placed. The rotary table 3 is formed so as to be rotatable from a horizontal attitude to an inclined attitude as the end material M1 is adhered thereto. The separation device includes a push-out lever 12 which pushes off the end material M1 adhered to the rotary table 3 in the inclined attitude of the rotary table 3. |
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