| 简介 |
PROBLEM TO BE SOLVED : To provide a manufacturing method and a structure of a cathode ensuring a sufficient electron emission efficiency, in a plane emission fluorescent light-emitting device.
SOLUTION : On an electrode layer 1 composed of tungsten or molybdenum, a conductive second layer 2 composed of Ru or Y and having a resistivity smaller than that of an electron emission layer is deposited by sputtering with a thickness of 1-200 nm. A layer having a work function smaller than that of the metal of the second layer 2 and equal to or smaller than 3.6 eV and composed of a rare earth material is formed to be laminated on the second layer 2, as an electron emission layer, by reactive sputtering with a thickness between 1 atomic layer and 10 nm.
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