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Rare-earth oxide-alumina ceramics having excellent plasma erosion resistance and manufacturing metho 发明授权

2023-08-04 2860 704K 0

专利信息

申请日期 2025-07-11 申请号 KR1020110050951
公开(公告)号 KR101268870B1 公开(公告)日 2013-05-23
公开国别 KR 申请人省市代码 全国
申请人 KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY
简介 PURPOSE : A rare earth oxide-alumina based ceramic with plasma resistance and excellent mechanical strength and a manufacturing method thereof are provided to obtain a ceramic which has phase stability and an excellent plasma-proof property. CONSTITUTION : A rare earth oxide-alumina based ceramics with plasma resistance is rare earth oxide-alumina based ceramic with a composition of A3Al5O12. A site is composed of GdxY1-x(0


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