| 简介 |
PURPOSE : A rare earth element fluoride powder spray material and a rare earth element fluoride spray member are provided to reduce the partial variation of color when the member is used as a plasma resistant member in a halogen gas.CONSTITUTION : A rare earth element fluoride powder spray material has a particle of which the outer shape has an aspect ratio of 2 or less. The average diameter of the particles is 10 to 100 micrometers, and the bulk density of the particles is 0.8 to 1.5 g/cm^3. The material contains 0.1 to 0.5 mass% of carbon. The total content of water and hydroxyl group is 10000 ppm or less. A rare earth element is at least one or two kinds selected from Y and 3A group elements of La to Lu.COPYRIGHT KIPO 2013 |
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