| 简介 |
PROBLEM TO BE SOLVED : To provide an oxide hard coating which has good properties and is inexpensively deposited by an improved arc vapor deposition process.
SOLUTION : A hard material film is deposited on a workpiece (30) as a functional film (32) by means of an arc-PVD method. The film is essentially formed as an electrically insulating oxide composed of at least one of the transition metals of the subgroups IV, V, VI of the periodic system and the metals (Me) of Al, Si, Fe, Co, Ni, Co, and Y, and the functional film (32) does not contain rare gas and halogen.
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