| 简介 |
The present invention is a composition for forming a film for liquid-immersion exposure, said composition containing the following : a polymer component (A) containing a polymer (a1) that has a constitutional unit (I) represented by diagram (1); and a solvent (B). In diagram (1), R4 and/or R5 is preferably a monovalent organic group containing a fluorine atom. Said monovalent organic group containing a fluorine atom is preferably a group represented by -RE-Rf, -RE-ORf, or -RE-OCORf, with RE representing a single bond or a divalent linking group and Rf representing a fluorinated alkyl group or a hydroxy fluorinated alkyl group. |
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