| 简介 |
PROBLEM TO BE SOLVED : To provide an optical element manufactured using a rare earth compound, without wasting a material.SOLUTION : A rare earth-containing layer 105 comprising an oxide of erbium is formed by a physical vapor deposition method such as a sputtering method, without heating a substrate. For example, by heating to 1000°C, a rare earth-containing layer 105 is aggregated on a groove part 104 to form a rare earth core part 106 comprising crystals of erbium oxide. The oxide of rare earth is heated to be aggregated on a recess part formed on the ground. In addition, by this heating, the erbium oxide in the amorphous state is crystallized, so the rare earth core part 106 comprises crystals of erbium oxide.COPYRIGHT : (C)2013, JPO&INPIT |
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