| 申请日期 | 2025-06-27 | 申请号 | US13602717 |
| 公开（公告）号 | US20120329999A1 | 公开（公告）日 | 2012-12-27 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Venkateswara R PALLEM; Christian Dussarrat | ||
| 简介 | Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor compounds comprising rare earth-containing compounds using deposition methods such as chemical vapor deposition or atomic layer deposition. The disclosed precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent and an amidine ligand. | ||
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