| 申请日期 | 2025-07-19 | 申请号 | ES05780121 |
| 公开（公告）号 | ES2392981T3 | 公开（公告）日 | 2012-12-17 |
| 公开国别 | ES | 申请人省市代码 | 全国 |
| 申请人 | HYOSUNG CORP | ||
| 简介 | Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom. | ||
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