| 简介 |
PROBLEM TO BE SOLVED : To provide a deposition apparatus that is capable of manufacturing a permanent magnet at low cost, by improving productivity using high speed deposition on a surface of the magnet having a predetermined shape of iron-boron-rare earth system, while effectively utilizing Dy and Tb that are deposition materials.
SOLUTION : The apparatus includes : a processing chamber 2 capable of vacuum evacuation; a heating means 23 for heating the interior of the processing chamber; and a holding means 6 for holding a metal evaporation material being a bulk body and a workpiece in the processing chamber. The apparatus is configured such that a heating means is operated under decompression of the processing chamber, a metal vapor atmosphere is formed in the processing chamber by heating the processing chamber at least to a temperature to evaporate the metal evaporation material, and metal atoms in the metal vapor atmosphere are deposited on a surface of the heated workpiece.
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