| 简介 |
PROBLEM TO BE SOLVED : To provide a transparent electrode film for photodetector comprising an inexpensive oxide transparent electrode film exhibiting excellent transmissivity not only in the visible light region but also in the near infrared region, and not using a rare metal having a low resistance, and to provide a photodetector equipped with the same.
SOLUTION : The transparent electrode film for photodetector comprises an oxide transparent electrode film formed by doping a zinc oxide with a low valence metal oxide as a dopant. The oxide transparent electrode film is primarily composed of zinc oxide and is deposited by sputtering, ion plating, pulse laser deposition (PLD method) or electron beam (EB) vapor deposition by using a target or a tablet doped with a low valence metal oxide. The low valence metal oxide is doped at an atomic ratio 0.02-0.1 of a low valence metal and zinc, and the specific resistance of the oxide transparent electrode film is 2.0×10-3 Ω cm or less.
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