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Al alloy, Al alloy film having a wiring structure, and Al alloy film used for the manufacture of a 发明授权

2023-01-01 1570 929K 0

专利信息

申请日期 2025-06-24 申请号 JP2011127711
公开(公告)号 JP5032687B2 公开(公告)日 2012-09-26
公开国别 JP 申请人省市代码 全国
申请人 Kobe Steel Ltd1199
简介 The present invention provides an Al alloy film that, in a production step of a thin-film transistor substrate, reflective film, reflective anode, touch panel sensor, or the like, can effectively prevent corrosion such as pinhole corrosion (black dots) or corrosion of the Al alloy surface when immersed in a sodium chloride solution, has superior corrosion resistance, is able to suppress hillock formation, and has superior heat resistance. The Al alloy thin film is used as a reflective film or a wiring film on a substrate, and contains 0.01-0.5 at % of Ta and/or Ti and 0.05-2.0 at % of a rare earth element.


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